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Optical scattering : measurements and analysis / John C. Stover

Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE press monograph ; 224Publisher: Bellingham, Wash. <1000 20th St. Bellingham WA 98225-6705 USA> : SPIE, 2012Edition: 3rd edDescription: Online Ressource (xxiv, 302 S.) : ill., digital fileISBN:
  • 0819492523
  • 9780819492524
  • 9780819492517
Subject(s): Additional physical formats: 0819492515. | 9780819492517. | Erscheint auch als: No title Druck-AusgabeDDC classification:
  • 535.43
  • 535/.43
RVK: RVK: UP 8000LOC classification:
  • QC427.4
DOI: DOI: 10.1117/3.975276Online resources: Additional physical formats: Also available in print version.Summary: The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and particles as well as the use of wafer scanners to locate and size isolated surface features. New sections cover the multimillion-dollar wafer scanner business, establishing that microroughness is the noise, not the signal, in these systems. Scatter measurements, now routinely used to determine whether small-surface features are pits or particles and inspiring new technology that provides information on particle material, are also discussed. These new capabilities are now supported by a series of international standards, and a new chapter reviews those documents. New information on scatter from optically rough surfaces has also been added. Once the critical limit is exceeded, scatter cannot be used to determine surface-roughness statistics, but considerable information can still be obtained - especially when measurements are made on mass-produced products. Changes in measurement are covered, and the reader will find examples of scatter measurements made using a camera for a fraction of the cost and in a fraction of the time previously possible. The idea of relating scatter to surface appearance is also discussed, and appearance has its own short chapter. After all, beauty is in the eye of the beholder, and what we see is scattered lightSummary: Preface to the first edition -- Preface to the second edition -- Acknowledgments for the second edition -- Preface to the third edition -- Acknowledgments for the third edition -- List of acronyms -- Chapter 1. Quantifying light scatter -- Chapter 2. Quantifying surface roughness -- Chapter 3. Scatter calculations and diffraction theory -- Chapter 4. Using Rayleigh-Rice to calculate smooth-surface statistics from the BRDF -- Chapter 5. Polarization of scattered light -- Chapter 6. Scattering models for discrete surface features -- Chapter 7. Instrumentation and measurement issues -- Chapter 8. Predicting scatter from roughness -- Chapter 9. Detection of discrete defects -- Chapter 10. Appearance and scattered light -- Chapter 11. Industrial applications -- Chapter 12. Published scatter standards -- Chapter 13. Scatter specifications -- Appendix A. Review of electromagnetic wave propagation -- Appendix B. Kirchhoff diffraction from sinusoidal gratings -- Appendix C. BSDF data -- Appendix D. Units -- References -- Works consultedPPN: PPN: 1018190597Package identifier: Produktsigel: ZDB-50-SPI
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