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Handbook of microlithography, micromachining, and microfabrication : volume 2: micromachining and microfabrication / P. Rai-Choudhury, editor

Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE press monograph ; PM40Publisher: Bellingham, Washington : SPIE Optical Engineering Press, 1997Description: 1 Online-Ressource (viii, 692 pages)ISBN:
  • 9781510607972
Other title:
  • Microlithography, micromachining, and microfabrication, volume 2, micromachining and microfabrication
  • Micromachining and microfabrication
Subject(s): Additional physical formats: 9780819423795 | 0819423793 | Erscheint auch als: Handbook of microlithography, micromachining, and microfabrication ; 2: Micromachining and microfabrication. Druck-Ausgabe. Bellingham, Wash. : SPIE Optical Engineering Pr., 1997. VIII, 692 S. | Erscheint auch als: No title Druck-AusgabeDDC classification:
  • 670
RVK: RVK: ZM 9000LOC classification:
  • TK7836
DOI: DOI: 10.1117/3.2265071Online resources: Summary: Preface -- 1. Micromachining and trends for the twenty-first century / Paul J. McWhorter, A. Bruno Frazier, P. Rai-Choudhury -- 2. Wet chemical etching of silicon and SiO2 and ten challenges for micromachiners / Don L. Kendall and Robert A. Shoultz -- 3. Applications of dry etching to microsensors, field emitters and optical devices / Stella W. Pang -- 4. Focussed ion beams for micromachining and microchemistry / Diane K. Stewart and J. David Casey, Jr. -- 5. Plating techniques / Lubomyr T. Romankiw and Eugene M. O'Sullivan -- 6. High aspect ratio processing / Craig R. Fiedrich [et al.] -- 7. Sensors and actuators / Hall Jerman and Stephen Terry -- 8. Micro-optical devices / Hiroyuki Fujita and Hiroshi Toshiyoshi -- 9. Micromachined systems for neurophysiological applications / Khalil Najafi -- 10. Thin-filmed-transistor-addressed liquid crystal displays / Fang-Chen Luo -- 11. Microsensors, actuators, MEMS, and electronics for smart structures / Vijay K. Varadan and Vasundara V. Varadan -- IndexPPN: PPN: 1018191186Package identifier: Produktsigel: ZDB-50-SPI
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