Handbook of microlithography, micromachining, and microfabrication : volume 2: micromachining and microfabrication / P. Rai-Choudhury, editor
Mitwirkende(r): Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Reihen: SPIE press monograph ; PM40Verlag: Bellingham, Washington : SPIE Optical Engineering Press, 1997Beschreibung: 1 Online-Ressource (viii, 692 pages)ISBN:- 9781510607972
- Microlithography, micromachining, and microfabrication, volume 2, micromachining and microfabrication
- Micromachining and microfabrication
- 670
- TK7836
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