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Optical gas sensing with MEMS FTIR spectrometers / by Mazen Erfan, Yasser M. Sabry, Marwa Ragheb, and Diaa Abdel Maguid Khalil

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE spotlight ; vol. SL32Publisher: Bellingham, Washington : SPIE Press, 2017Description: 1 Online-Ressource (v, 35 pages) : illustrationsISBN:
  • 9781510613690
  • 9781510613713
  • 9781510613706
Subject(s): Additional physical formats: 9781510613706 DDC classification:
  • 543.08583 23
LOC classification:
  • QD96.I5
DOI: DOI: 10.1117/3.2283087Online resources: Summary: This Spotlight focuses on the use of MEMS Fourier-transform infrared spectrometers as a core building block in optical gas sensing. Micro-optical bench technology is discussed, followed by the basics of the sensing technique. An overview of the system components and their state of the art is given, including the light source, the miniaturized interferometer and gas cell, the optical connectivity, and detection for both the near-infrared and the mid-infrared spectral ranges. A comparison shows the pros and cons of each regime, accounting for the absorption cross-sections of the gases and the signal-to-noise performance of the system components. The impact of the limitation on the signal-to-noise ratio and spectral resolution due to miniaturization on the gas sensor performance is also discussed. An experimental setup to evaluate the sensor performance and extract its sensitivity is explained, and experimental results of detecting acetylene and carbon dioxide gases are presented. The book concludes with a discussion of the foreseen challenges and potentialSummary: Preface -- 1. Introduction -- 2. Gas sensing: 2.1. Market needs; 2.2. Sensing technologies; 2.3. Gas phase spectra in the IR range -- 3. Silicon-based micro-optical bench technology: 3.1. Deep reactive ion etching; 3.2. Deeply etched SOI microbenches; 3.3. Other technologies for microbenches -- 4. FTIR Spectrometer: 4.1. Michelson interferometer MEMS chip; 4.2. FTIR gas sensor; 4.3. Sensing in the NIR range; 4.4. Sensing in the MIR range -- 5. Gas Sensing Analysis in the NIR range -- 6. Experimental results: 6.1. C2H2 standard gas-cell measurements; 6.2. Gas measurement setup using a MEMS FTIR spectrometer; 6.3. Measurements in the NIR spectral range; 6.4. Measurements in the MIR spectral range -- 7. Foreseen challenges: 7.1. Light-diffraction effect; 7.2. Silicon dispersion -- ReferencesPPN: PPN: 1018191526Package identifier: Produktsigel: ZDB-50-SPI | ZDB-50-SPI
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