APA

Laser-based Micro- and Nanoprocessing, Klotzbach U., Washio K., Kling R. & SPIE. (2018). Laser-Based Micro- and Nanoprocessing XII. Bellingham, Washington, USA: SPIE.

Chicago

Laser-based Micro- and Nanoprocessing, Klotzbach Udo, Washio Kunihiko, Kling Rainer and SPIE. 2018. Laser-Based Micro- and Nanoprocessing XII. Bellingham, Washington, USA: SPIE.

Harvard

Laser-based Micro- and Nanoprocessing, Klotzbach U., Washio K., Kling R. and SPIE. (2018). Laser-Based Micro- and Nanoprocessing XII. Bellingham, Washington, USA: SPIE.

MLA

Laser-based Micro- and Nanoprocessing, Klotzbach Udo, Washio Kunihiko, Kling Rainer and SPIE. Laser-Based Micro- and Nanoprocessing XII. Bellingham, Washington, USA: SPIE. 2018.