Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact / by Cor Claeys, Eddy Simoen
Mitwirkende(r): Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Reihen: Springer Series in Materials Science ; 270 | Springer eBook Collection | SpringerLink BücherVerlag: Cham : Springer International Publishing, 2018Beschreibung: Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color, online resource)ISBN:- 9783319939254
- 620.11295
- 620.11297
- TA1750-1750.22
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Reproduktion. (Springer eBook Collection. Chemistry and Materials Science)