Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact / by Cor Claeys, Eddy Simoen

Von:

Claeys, Cor L, 1951- [VerfasserIn]

Mitwirkende(r):

Simoen, Eddy [VerfasserIn]

Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Reihen: Springer Series in Materials Science ; 270 | Springer eBook Collection | SpringerLink BücherVerlag: Cham : Springer International Publishing, 2018Beschreibung: Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color, online resource)ISBN:

9783319939254

Schlagwörter:

Andere physische Formen: 9783319939247 | 9783319939261 | Erscheint auch als: 978-3-319-93924-7 Druck-Ausgabe | Printed edition: 9783319939247 | Printed edition: 9783319939261 DDC-Klassifikation:

620.11295
620.11297

LOC-Klassifikation:

TA1750-1750.22

DOI: DOI: 10.1007/978-3-319-93925-4Online-Ressourcen:

Zusammenfassung: This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on the electrical device performance. Several control and possible gettering approaches are addressed. The book is a reference for researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. It has an interdisciplinary nature by combining different disciplines such as material science, defect engineering, device processing, defect and device characterization and device physics and engineeringZusammenfassung: Preface -- Introduction -- Basic Properties of Metals in Semiconductors -- Sources of Metals in Si and Ge Processing -- Characterization and Detection of Metals in Silicon and Germanium -- Electrical Activity of Metals in Si and Ge -- Impact of Metals on Silicon Devices and Circuits -- Gettering and Passivation of Metals in Silicon and Germanium -- Modeling and Simulation of Metals in Silicon and Germanium -- ConclusionsPPN: PPN: 1030108668Package identifier: Produktsigel: ZDB-2-CMS | ZDB-2-SEB | ZDB-2-SXC

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