Metrology, Inspection, and Process Control for Microlithography XXXII : 26 February-1 March 2018, San Jose, California, Unites States / Vladimir A. Ukraintsev, Ofer Adan (editors) ; sponsored by: SPIE

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(32. : Metrology, Inspection, and Process Control for Microlithography (Veranstaltung) (32. : 2018 : San Jose, Calif.) [VerfasserIn]

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Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 10585Publisher: Bellingham, Washington, USA : SPIE, [2018]Description: 1 Online-Ressource : IllustrationenISBN:

9781510616639

Other title:

SPIE Advanced Lithography International Symposium

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Konferenzschrift

Additional physical formats: 9781510616622 Online resources:

PPN: PPN: 1030372772Package identifier: Produktsigel: ZDB-1-SPIE

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