APA

European Mask and Lithography Conference, Behringer U., Finders J., Gesellschaft Mikroelektronik M. u. F. & SPIE. (2018). 34th European Mask and Lithography Conference. Bellingham, Washington, USA: SPIE.

Chicago

European Mask and Lithography Conference, Behringer Uwe, Finders Jo, Gesellschaft Mikroelektronik Mikrosystem und Feinwerktechnik and SPIE. 2018. 34th European Mask and Lithography Conference. Bellingham, Washington, USA: SPIE.

Harvard

European Mask and Lithography Conference, Behringer U., Finders J., Gesellschaft Mikroelektronik M. u. F. and SPIE. (2018). 34th European Mask and Lithography Conference. Bellingham, Washington, USA: SPIE.

MLA

European Mask and Lithography Conference, Behringer Uwe, Finders Jo, Gesellschaft Mikroelektronik Mikrosystem und Feinwerktechnik and SPIE. 34th European Mask and Lithography Conference. Bellingham, Washington, USA: SPIE. 2018.