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Wafer fabrication : automatic material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Publisher: Berlin ; Boston : De Gruyter, [2018]Copyright date: ©2018Description: 1 Online-Ressource (XI, 272 Seiten) : IllustrationenISBN:
  • 9783110487237
  • 9783110487473
Subject(s): Additional physical formats: 9783110486902. | Erscheint auch als: Wafer fabrication. Druck-Ausgabe Berlin : de Gruyter, 2018. XI, 272 SeitenDDC classification:
  • 621.39/5 23
  • 621.3
LOC classification:
  • TK7871.85
DOI: DOI: 10.1515/9783110487473Online resources:
Contents:
Frontmatter -- -- Preface -- -- Contents -- -- 1 Semiconductor wafer fabrication system -- -- 2 Automated material handling systems in SWFSs -- -- 3 Modeling methods of automated material handling systems in SWFSs -- -- 4 Analysis of automated material handling systems in SWFSs -- -- 5 Scheduling methods of automated material handling systems in SWFSs -- -- 6 Scheduling in Interbay automated material handling systems -- -- 7 Scheduling in Intrabay automatic material handling systems -- -- 8 Integrated scheduling in AMHSs -- -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- -- Index
Summary: Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- IndexPPN: PPN: 1042460035Package identifier: Produktsigel: EBA-CL-CHCOMSGSEN | EBA-DGALL | EBA-EBKALL | EBA-ECL-CHCOMSGSEN | EBA-EEBKALL | EBA-ESTMALL | EBA-STMALL | GBV-deGruyter-alles | ZDB-23-DEI | ZDB-23-DGG | EBA-BACKALL | EBA-EBACKALL | BSZ-23-EBA-C1UB
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