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Wafer fabrication : automatic material handling systems / Jie Zhang, Wei Qin, Lihui Wu, Junliang Wang, Youlong Lv, Xiaoxi Wang
Mitwirkende(r): Resource type: Ressourcentyp: Buch (Online)Buch (Online)Sprache: Englisch Verlag: Berlin ; Boston : De Gruyter, [2018]Copyright-Datum: ©2018Beschreibung: 1 Online-Ressource (XI, 272 Seiten) : IllustrationenISBN:- 9783110487237
- 9783110487473
- 621.39/5 23
- 621.3
- TK7871.85
Inhalte:
Zusammenfassung: Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- IndexPPN: PPN: 1042460035Package identifier: Produktsigel: EBA-CL-CHCOMSGSEN | EBA-DGALL | EBA-EBKALL | EBA-ECL-CHCOMSGSEN | EBA-EEBKALL | EBA-ESTMALL | EBA-STMALL | GBV-deGruyter-alles | ZDB-23-DEI | ZDB-23-DGG | EBA-BACKALL | EBA-EBACKALL | BSZ-23-EBA-C1UB
Frontmatter -- -- Preface -- -- Contents -- -- 1 Semiconductor wafer fabrication system -- -- 2 Automated material handling systems in SWFSs -- -- 3 Modeling methods of automated material handling systems in SWFSs -- -- 4 Analysis of automated material handling systems in SWFSs -- -- 5 Scheduling methods of automated material handling systems in SWFSs -- -- 6 Scheduling in Interbay automated material handling systems -- -- 7 Scheduling in Intrabay automatic material handling systems -- -- 8 Integrated scheduling in AMHSs -- -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- -- Index
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