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Advances in Metrology for X-Ray and EUV Optics VII : 6-7 August 2017, San Diego, California, United States / Lahsen Assoufid, Haruhiko Ohashi, Anand Khrishna Asundi (editors) ; sponsored and published by: SPIE

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 10385Publisher: Bellingham, Washington, USA : SPIE, [2017]Description: 1 Online-Ressource : IllustrationenISBN:
  • 9781510612280
Other title:
  • SPIE Optical Engineering Applications Optics Photonics
Subject(s): Genre/Form: Additional physical formats: 9781510612273 | Erscheint auch als: Advances in Metrology for X-Ray and EUV Optics VII. Druck-Ausgabe Bellingham, Washington, USA : SPIE, 2017. circa 150 verschieden gezählte SeitenOnline resources: PPN: PPN: 1045732656Package identifier: Produktsigel: ZDB-1-SPIE
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