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33rd European Mask and Lithography Conference : 26-28 June 2017, Dresden, Germany / Uwe F.W. Behringer, Jo Finders (editors) ; organized by: VDE/VDI GMM - the Society for Microelectronics, Microsystems and Precision Engineering (Germany) ; published by: SPIE

By: Contributor(s): Resource type: Ressourcentyp: Buch (Online)Book (Online)Language: English Series: SPIE. Proceedings of SPIE ; volume 10446Publisher: Bellingham, Washington, USA : SPIE, [2017]Description: 1 Online-Ressource : IllustrationenISBN:
  • 9781510613577
Other title:
  • Thirty-third EMCL
Subject(s): Genre/Form: Additional physical formats: 9781510613560 | Erscheint auch als: 33rd European Mask and Lithography Conference. Druck-Ausgabe Bellingham, Washington, USA : SPIE, 2017. circa 240 verschieden gezählte SeitenOnline resources: PPN: PPN: 1046411861Package identifier: Produktsigel: ZDB-1-SPIE
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