Microelectronics processing : chemical engineering aspects / Dennis W. Hess, ed. ...

Contributor(s):

Hess, Dennis W [Hrsg.]

Resource type: Ressourcentyp: BuchBookLanguage: English Series: Advances in chemistry series ; 221Publisher: Washington, DC : American Chemical Society, 1989Description: XIV, 547 S. : Ill., graph. Darst. ; 24 cmISBN:

0841214751

Subject(s):

Technische Chemie
Mikroelektronikindustrie
Aufsatzsammlung
Microelectronics
Integrated circuits
Surface chemistry

Genre/Form:

Aufsatzsammlung

DDC classification:

621.381

LOC classification:

QD1
TK7874

Call number: Grundsignatur: 92 A 3200PPN: PPN: 025222732

Holdings ( 1 )

Holdings
Item type	Home library	Shelving location	Call number	Status	Date due	Barcode	Item holds
Magazinbestand ausleihbar	Bibliothek Campus Süd	Geschlossenes Magazin	92 A 3200	Available		45004470090

Total holds: 0

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