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Dry etching for microelectronics / Ronald A. Powell [Hrsg.]
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: Materials processing, theory and practices ; 4Publisher: Amsterdam [u.a.] : North-Holland Physics Publ., 1984Description: XI, 299 S : Ill., graph. DarstISBN:- 0444869050
- 621.381/73
| Item type | Home library | Shelving location | Call number | Status | Barcode | |
|---|---|---|---|---|---|---|
| Magazinbestand ausleihbar | Bibliothek Campus Süd | Geschlossenes Magazin | 84 A 4539 | Available | 48984334090 |
Total holds: 0