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Polymers in microlithography : materials and processes ; developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 / Elsa Reichmanis, ed. ...
Contributor(s): Resource type: Ressourcentyp: BuchBookLanguage: English Series: American Chemical Society. ACS symposium series ; 412Publisher: Washington, DC : American Chemical Society, 1989Description: XII, 449 S : graph. DarstISBN:- 0841217017
- 621.381531
- 621.381/531
- 621.381'531
- TK7871.15.P6
- 2
| Item type | Home library | Collection | Shelving location | Call number | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|---|
| Freihandbestand Präsenznutzung | Fachbibliothek Chemie | chem 7.43 | Bibliothek / frei aufgestellt | 90 A 1737 | Not for loan | 29130975 |
Total holds: 0
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