APA
International Conference on Ion Implantation in Semiconductors, Hohmuth K., . (19). Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Dresden: Zentralinst.f. Kernforschung.
Chicago
International Conference on Ion Implantation in Semiconductors, Hohmuth Karl, . 19. Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Dresden: Zentralinst.f. Kernforschung.
Harvard
International Conference on Ion Implantation in Semiconductors, Hohmuth K., . (19). Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Dresden: Zentralinst.f. Kernforschung.
MLA
International Conference on Ion Implantation in Semiconductors, Hohmuth Karl, . Proceedings / International Conference on Ion Implantation in Semiconductors. Mezdunarodnaja Konferencija poIonnoj Implantacii v Poluprovodnikach. Dresden: Zentralinst.f. Kernforschung. 19.