Materials science in microelectronics / E. S. Machlin

By:

Machlin, Eugene S [aut]

Resource type: Ressourcentyp: GesamtaufnahmeSetLanguage: English Volumes: Show volumesPublisher: Amsterdam ; Heidelberg [u.a.] : Elsevier, 19XX-Publisher: Croton-on-Hudson, NY : Giro Press, früherISBN:

187885707X

Subject(s):

Mikroelektronik
Werkstoff
Dünne Schicht
Thin films

RVK: RVK: UP 7500PPN: PPN: 1116317095

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