Silicon nitride for microelectronic applications / John T. Milek
Resource type: Ressourcentyp: GesamtaufnahmeSetLanguage: English Series: Handbook of electronic materials ; ...Volumes: Show volumesPublisher: New York [u.a.] : IFI/Plenum, 19XX-Subject(s): RVK: RVK: UP 3100PPN: PPN: 1120207614No physical items for this record