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X-ray optics made by X-ray lithography : process optimization and quality control / by Frieder Johannes Koch

By: Resource type: Ressourcentyp: BuchBookLanguage: English Series: Institut für Mikrostrukturtechnik. Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie (KIT) ; Band 36Publisher: Karlsruhe : KIT Scientific Publishing, [2017]Description: X, 138 Seiten : IllustrationenISBN:
  • 9783731506799
Subject(s): Genre/Form: Additional physical formats: Erscheint auch als: X-ray optics made by X-ray lithography. Online-Ausgabe Karlsruhe : KIT Scientific Publishing, 2017. 1 Online-Ressource (X, 138 Seiten)Dissertation note: Dissertation - Karlsruher Institut für Technologie (KIT), 2017 Call number: Grundsignatur: 2017 A 6476PPN: PPN: 156473949X
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Item type Home library Collection Shelving location Call number Status Barcode
Freihandbestand ausleihbar Bibliothek Campus Süd masch11 Lesesaal Technik (LST) 2017 A 6476 Available 52339131090
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