X-ray optics made by X-ray lithography : process optimization and quality control / by Frieder Johannes Koch
Resource type: Ressourcentyp: BuchBookLanguage: English Series: Institut für Mikrostrukturtechnik. Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie (KIT) ; Band 36Publisher: Karlsruhe : KIT Scientific Publishing, [2017]Description: X, 138 Seiten : IllustrationenISBN:- 9783731506799
| Item type | Home library | Collection | Shelving location | Call number | Status | Barcode | |
|---|---|---|---|---|---|---|---|
| Freihandbestand ausleihbar | Bibliothek Campus Süd | masch11 | Lesesaal Technik (LST) | 2017 A 6476 | Available | 52339131090 |
Total holds: 0