Fundamentals of microfabrication and nanotechnology / Marc J. Madou

By: Resource type: Ressourcentyp: Gesamtaufnahme (Online)Set (Online)Language: English Volumes: Show volumesPublisher: Boca Raton ; London ; New York : CRC Press, [2011]Edition: Third editionUniform titles:
  • Fundamentals of microfabrication
Subject(s): Additional physical formats: Erscheint auch als: Fundamentals of microfabrication and nanotechnology. Druck-Ausgabe 3. ed. Boca Raton, Fla. [u.a.] : CRC Press, 2012PPN: PPN: 1577276264
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